SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//- Buy Price(exc VAT)
tech sheet
Details
Body Material
Aluminium
Application
High vacuum angle valve for semiconductor and vacuum applications
Ambient Temperature
5 to 60°C
Width mm
108
Height mm
38
Valve Material
Aluminium
Brand
SMC
Operation
Normally Closed
Seal Material
FKM
Actuation
Single acting
Manufacturer
SMC
Length mm
60
Angle
Angle Valve
Series
XL2
Feature
Bellows seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Length mm
Actuator Working Temperature
Operation
Feature
Application
Seal Type
Flange Specification
Actuation
List Price
66
171
98
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Available to Order
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5 to 60°C
Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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–
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Available to Order
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–
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Normally Closed Bellows Seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High Vacuum
–
–
–
Available to Order
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Normally Closed
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum applications requiring minimal contamination and corrosion resistance
Bellows seal
KF NW
Single acting
Available to Order
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–
–
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Normally Closed
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High Vacuum
Bellows seal
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
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High Vacuum
–
–
–
Available to Order
48
121
74
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum angle valve for semiconductor and vacuum applications
Bellows seal
–
Normally Closed
Available to Order
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–
–
–
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–
–
–
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Normally Closed
Available to Order
48
121
74
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–
–
–
–
–
–
Available to Order
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–
–
–
–
–
–
–
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–
Available to Order
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Normally Closed
Available to Order
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Available to Order
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Available to Order
79
185
110
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Available to Order
38
108
59
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Normally Closed
Available to Order
66
171
104
–
–
–
–
–
–
–
Available to Order
66
171
98
–
Normally Closed
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
Bellows seal
–
Single acting
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
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Available to Order