SMC High Vacuum Angle Valve
Product Code: XLA-50-2M9//XF1AManufacturer Code: XLA-50-2M9//-XF1A...
Available to Order
tech sheet
Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Body Material
Series
Seal Material
Height mm
Width mm
Length mm
Actuator Working Temperature
Application
Operation
Ambient Temperature
Feature
Seal Type
Angle
Flange Specification
Actuation
Valve Material
List Price
Aluminium
XL2
FKM
66
171
98
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
High Vacuum
Normally Closed Bellows Seal
5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
High vacuum applications requiring minimal contamination and corrosion resistance
Normally Closed
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Bellows seal
Angle Valve
KF NW
Single acting
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
High Vacuum
Normally Closed
–
–
Bellows seal
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
High Vacuum
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
48
121
74
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Bellows seal
–
–
Normally Closed
Aluminium
Available to Order
Aluminium
XL2
FKM
–
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
Aluminium
XL2
FKM
48
121
74
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
79
185
110
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
38
108
59
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
Aluminium
XL2
FKM
66
171
104
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
66
171
98
–
–
Normally Closed
–
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows seal
–
–
Single acting
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Aluminium
XL2
FKM
–
–
–
–
High Vacuum Angle Valve
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order