SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//...
Available to Order
tech sheet
Details
Body Material
Aluminium
Application
High vacuum angle valve for semiconductor and vacuum applications
Brand
SMC
Seal Material
FKM
Operation
Normally Closed, Single Acting, Bellows Seal
Manufacturer
SMC
Actuator Working Temperature
5 to 60°C
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Length mm
Ambient Temperature
Feature
Operation
Application
Seal Type
Angle
Flange Specification
Actuation
Valve Material
List Price
66
171
98
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Available to Order
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5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed Bellows Seal
High Vacuum
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–
–
–
–
Available to Order
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–
–
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
Bellows seal
Angle Valve
KF NW
Single acting
–
Available to Order
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–
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Normally Closed
High Vacuum
Bellows seal
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Available to Order
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Available to Order
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5 to 60°C
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Normally Closed Bellows Seal
High Vacuum
–
–
–
–
–
Available to Order
48
121
74
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
High vacuum angle valve for semiconductor and vacuum applications
Bellows seal
–
–
Normally Closed
Aluminium
Available to Order
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Normally Closed
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Available to Order
48
121
74
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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Available to Order
79
185
110
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–
Available to Order
38
108
59
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–
–
–
–
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Normally Closed
–
Available to Order
66
171
104
–
–
–
–
–
–
–
–
–
Available to Order
66
171
98
–
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
–
Bellows seal
–
–
Single acting
–
Available to Order
–
–
–
–
–
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
High Vacuum Angle Valve
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Available to Order