SMC High Vacuum Angle Valve
Product Code: XLA-40-2- Buy Price(exc VAT)
tech sheet
Details
Body Material
Aluminium
Width mm
171
Brand
SMC
Seal Material
FKM
Height mm
66
Manufacturer
SMC
Length mm
98
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Actuator Working Temperature
Application
Operation
Ambient Temperature
Feature
Seal Type
Angle
Flange Specification
Actuation
Width mm
Valve Material
Length mm
Height mm
List Price
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
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Available to Order
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High Vacuum
Normally Closed Bellows Seal
5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Available to Order
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High vacuum applications requiring minimal contamination and corrosion resistance
Normally Closed
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Bellows seal
Angle Valve
KF NW
Single acting
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Available to Order
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High Vacuum
Normally Closed
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Bellows seal
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Available to Order
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Available to Order
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High Vacuum
Normally Closed Bellows Seal
5 to 60°C
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Bellows seal
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Normally Closed
121
Aluminium
74
48
Available to Order
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Normally Closed
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Available to Order
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121
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74
48
Available to Order
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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Available to Order
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185
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110
79
Available to Order
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Normally Closed
108
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59
38
Available to Order
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171
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104
66
Available to Order
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Normally Closed
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High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Bellows seal
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Single acting
171
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98
66
Available to Order
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Available to Order
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Available to Order
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High Vacuum Angle Valve
Normally Closed Bellows Seal
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Available to Order