SMC High Vacuum Angle Valve
Product Code: XLA-50-2-XF1A- Buy Price(exc VAT)
tech sheet
Details
Body Material
Aluminium
Ambient Temperature
5 to 60°C
Operation
Normally Closed Bellows Seal
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Brand
SMC
Seal Material
FKM
Manufacturer
SMC
Application
High Vacuum
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Length mm
Actuator Working Temperature
Application
Operation
Seal Type
Angle
Feature
Flange Specification
Actuation
Valve Material
List Price
66
171
98
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
–
Available to Order
–
–
–
–
High vacuum applications requiring minimal contamination and corrosion resistance
Normally Closed
Bellows seal
Angle Valve
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
KF NW
Single acting
–
Available to Order
–
–
–
–
High Vacuum
Normally Closed
Bellows seal
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
High Vacuum
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
48
121
74
–
High vacuum angle valve for semiconductor and vacuum applications
–
Bellows seal
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
Normally Closed
Aluminium
Available to Order
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
48
121
74
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
79
185
110
–
–
–
–
–
–
–
–
–
Available to Order
38
108
59
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
66
171
104
–
–
–
–
–
–
–
–
–
Available to Order
66
171
98
–
–
Normally Closed
Bellows seal
–
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
Single acting
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
High Vacuum Angle Valve
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order