SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Body Material
Aluminium
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Brand
SMC
Operation
Normally Closed
Seal Material
FKM
Actuation
Single acting
Seal Type
Bellows seal
Manufacturer
SMC
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Flange Specification
KF NW
Angle
Angle Valve
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Length mm
Actuator Working Temperature
Application
Operation
Ambient Temperature
Feature
Valve Material
Actuation
List Price
66
171
98
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Available to Order
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5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
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Available to Order
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High Vacuum
Normally Closed Bellows Seal
5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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–
Available to Order
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High Vacuum
Normally Closed
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–
Available to Order
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Available to Order
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High Vacuum
Normally Closed Bellows Seal
5 to 60°C
–
–
–
Available to Order
48
121
74
–
High vacuum angle valve for semiconductor and vacuum applications
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–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Aluminium
Normally Closed
Available to Order
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Normally Closed
Available to Order
48
121
74
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–
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–
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–
Available to Order
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–
–
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Available to Order
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Normally Closed
Available to Order
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Available to Order
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Available to Order
79
185
110
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Available to Order
38
108
59
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Normally Closed
Available to Order
66
171
104
–
–
–
–
–
–
–
Available to Order
66
171
98
–
–
Normally Closed
–
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
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Single acting
Available to Order
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–
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–
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Available to Order
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Available to Order
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High Vacuum Angle Valve
Normally Closed Bellows Seal
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Available to Order