SMC High Vacuum Angle Valve
Product Code: XLA-16G-2...
Available to Order
tech sheet
Details
Body Material
Aluminium
Application
High vacuum angle valve for semiconductor and vacuum applications
Actuation
Normally Closed
Brand
SMC
Seal Material
FKM
Seal Type
Bellows seal
Manufacturer
SMC
Series
XL2
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Length mm
Actuator Working Temperature
Operation
Ambient Temperature
Feature
Application
Angle
Flange Specification
Actuation
Valve Material
List Price
66
171
98
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Available to Order
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5 to 60°C
Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Normally Closed Bellows Seal
5 to 60°C
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High Vacuum
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Available to Order
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Normally Closed
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum applications requiring minimal contamination and corrosion resistance
Angle Valve
KF NW
Single acting
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Available to Order
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Normally Closed
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High Vacuum
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
5 to 60°C
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High Vacuum
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Available to Order
48
121
74
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed
Aluminium
Available to Order
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Normally Closed
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Available to Order
48
121
74
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Available to Order
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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Available to Order
79
185
110
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Available to Order
38
108
59
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Normally Closed
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Available to Order
66
171
104
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–
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–
–
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–
Available to Order
66
171
98
–
Normally Closed
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High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
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Single acting
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Available to Order
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Available to Order
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Available to Order