Details
Model
XGT223-46236-1F
Brand
SMC
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Manufacturer
SMC
Series
XGT
Valve Material
FKM (Gate O-ring Material)
Accessories
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Specification
SMC Slit Valve, SMC
